Direct Implicit and Explicit Energy-Conserving Particle-in-Cell Methods for Modeling of Capacitively-Coupled Plasma Devices

发布时间:2024-06-24浏览次数:89

报告题目:Direct Implicit and Explicit Energy-Conserving Particle-in-Cell Methods for Modeling of Capacitively-Coupled Plasma Devices

报告人:Haomin Sun

报告时间:202471日星期一下午1430

报告地点:物理科技楼101

报告邀请人:徐亮

报告摘要:With the trend of decreasing pressure in applications such as plasma etching, kinetic simulations are necessary to self-consistently capture the particle dynamics. The standard, explicit, electrostatic, momentum-conserving Particle-In-Cell method suffers from restrictive stability constraints on spatial cell size and temporal time step, requiring resolution of the electron Debye length and electron plasma period respectively. This results in a very high computational cost, making the technique prohibitive for large volume device modeling. We investigate the Direct Implicit algorithm and the explicit Energy Conserving algorithm as alternatives to the standard approach, both of which can reduce computational cost with a minimal (or controllable) impact on results. These algorithms are implemented into the well-tested EDIPIC-2D and LTP-PIC codes, and their performance is evaluated via 2D capacitively coupled plasma discharge simulations. It is demonstrated that by appropriately adjusting the ratio of cell size to time step, it is possible to mitigate the numerical heating to an acceptable level.

报告人简介:Haomin Sun is a PhD student at École Polytechnique Fédérale de Lausanne (EPFL), Swiss Plasma Center (SPC). He received his Master and Bechalor's Degree from University of Science and Technology of China (USTC), school of gifted young, during which he was awarded twice the National Scholarship. He was admitted to the PhD program in plasma physics at Princeton University and published a highly impactful paper in Physical Review Letters. He has now published more than 15 SCI jounral papers, including a recent paper selected as a featured article in physics of plasmas and rewarded the early career collection.

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